diff --git a/level_zero/api/driver_experimental/tracing/CMakeLists.txt b/level_zero/api/driver_experimental/tracing/CMakeLists.txt
index 8376af0bd8..f6d4a2047c 100644
--- a/level_zero/api/driver_experimental/tracing/CMakeLists.txt
+++ b/level_zero/api/driver_experimental/tracing/CMakeLists.txt
@@ -6,6 +6,7 @@
 
 target_sources(${L0_STATIC_LIB_NAME}
                PRIVATE
+               ${CMAKE_CURRENT_SOURCE_DIR}/CMakeLists.txt
                ${CMAKE_CURRENT_SOURCE_DIR}/zet_tracing.cpp
                ${CMAKE_CURRENT_SOURCE_DIR}/zet_tracing.h
 )
diff --git a/level_zero/api/sysman/CMakeLists.txt b/level_zero/api/sysman/CMakeLists.txt
index 11b14c560b..ac251a3945 100644
--- a/level_zero/api/sysman/CMakeLists.txt
+++ b/level_zero/api/sysman/CMakeLists.txt
@@ -6,6 +6,7 @@
 
 target_sources(${L0_STATIC_LIB_NAME}
                PRIVATE
+               ${CMAKE_CURRENT_SOURCE_DIR}/CMakeLists.txt
                ${CMAKE_CURRENT_SOURCE_DIR}/ze_sysman_loader.cpp
                ${CMAKE_CURRENT_SOURCE_DIR}/zes_sysman_api_entrypoints.h
                ${CMAKE_CURRENT_SOURCE_DIR}/zes_sysman_all_api_entrypoints.h
diff --git a/level_zero/api/tools/CMakeLists.txt b/level_zero/api/tools/CMakeLists.txt
index a25dd7b620..8ebb5e3338 100644
--- a/level_zero/api/tools/CMakeLists.txt
+++ b/level_zero/api/tools/CMakeLists.txt
@@ -6,6 +6,7 @@
 
 target_sources(${L0_STATIC_LIB_NAME}
                PRIVATE
+               ${CMAKE_CURRENT_SOURCE_DIR}/CMakeLists.txt
                ${CMAKE_CURRENT_SOURCE_DIR}/ze_tools_loader.cpp
                ${CMAKE_CURRENT_SOURCE_DIR}/zet_debug_api_entrypoints.h
                ${CMAKE_CURRENT_SOURCE_DIR}/zet_metric_api_entrypoints.h
diff --git a/level_zero/sysman/source/firmware_util/CMakeLists.txt b/level_zero/sysman/source/firmware_util/CMakeLists.txt
index ff7d76c5a2..01775d3508 100644
--- a/level_zero/sysman/source/firmware_util/CMakeLists.txt
+++ b/level_zero/sysman/source/firmware_util/CMakeLists.txt
@@ -7,6 +7,7 @@
 if(igsc_FOUND)
   target_sources(${L0_STATIC_LIB_NAME}
                  PRIVATE
+                 ${CMAKE_CURRENT_SOURCE_DIR}/CMakeLists.txt
                  ${CMAKE_CURRENT_SOURCE_DIR}/firmware_util_imp.cpp
                  ${CMAKE_CURRENT_SOURCE_DIR}/firmware_util_imp.h
                  ${CMAKE_CURRENT_SOURCE_DIR}/firmware_util.h
@@ -17,6 +18,7 @@ if(igsc_FOUND)
 else()
   target_sources(${L0_STATIC_LIB_NAME}
                  PRIVATE
+                 ${CMAKE_CURRENT_SOURCE_DIR}/CMakeLists.txt
                  ${CMAKE_CURRENT_SOURCE_DIR}/firmware_util_imp_stub.cpp
                  ${CMAKE_CURRENT_SOURCE_DIR}/firmware_util.h
                  ${CMAKE_CURRENT_SOURCE_DIR}/igsc_wrapper.h
diff --git a/level_zero/sysman/source/linux/nl_api/CMakeLists.txt b/level_zero/sysman/source/linux/nl_api/CMakeLists.txt
index f992bba075..9a0c733f78 100644
--- a/level_zero/sysman/source/linux/nl_api/CMakeLists.txt
+++ b/level_zero/sysman/source/linux/nl_api/CMakeLists.txt
@@ -8,6 +8,7 @@ if(UNIX)
   if(LIBGENL_FOUND)
     target_sources(${L0_STATIC_LIB_NAME}
                    PRIVATE
+                   ${CMAKE_CURRENT_SOURCE_DIR}/CMakeLists.txt
                    ${CMAKE_CURRENT_SOURCE_DIR}/nl_api.h
                    ${CMAKE_CURRENT_SOURCE_DIR}/nl_api.cpp
                    ${CMAKE_CURRENT_SOURCE_DIR}/iaf_nl_api.h
diff --git a/level_zero/sysman/source/linux/pmt/CMakeLists.txt b/level_zero/sysman/source/linux/pmt/CMakeLists.txt
index c48ebc0677..b7372c0a21 100644
--- a/level_zero/sysman/source/linux/pmt/CMakeLists.txt
+++ b/level_zero/sysman/source/linux/pmt/CMakeLists.txt
@@ -7,6 +7,7 @@
 if(UNIX)
   target_sources(${L0_STATIC_LIB_NAME}
                  PRIVATE
+                 ${CMAKE_CURRENT_SOURCE_DIR}/CMakeLists.txt
                  ${CMAKE_CURRENT_SOURCE_DIR}/pmt_helper.cpp
                  ${CMAKE_CURRENT_SOURCE_DIR}/pmt.cpp
                  ${CMAKE_CURRENT_SOURCE_DIR}/pmt.h
diff --git a/level_zero/sysman/source/linux/pmu/CMakeLists.txt b/level_zero/sysman/source/linux/pmu/CMakeLists.txt
index 964b9bfc8d..fff9e2cd70 100644
--- a/level_zero/sysman/source/linux/pmu/CMakeLists.txt
+++ b/level_zero/sysman/source/linux/pmu/CMakeLists.txt
@@ -7,6 +7,7 @@
 if(UNIX)
   target_sources(${L0_STATIC_LIB_NAME}
                  PRIVATE
+                 ${CMAKE_CURRENT_SOURCE_DIR}/CMakeLists.txt
                  ${CMAKE_CURRENT_SOURCE_DIR}/pmu_imp.cpp
                  ${CMAKE_CURRENT_SOURCE_DIR}/pmu_imp.h
                  ${CMAKE_CURRENT_SOURCE_DIR}/pmu.h
diff --git a/level_zero/sysman/source/memory/windows/CMakeLists.txt b/level_zero/sysman/source/memory/windows/CMakeLists.txt
index c888a539c3..887e9d65e6 100755
--- a/level_zero/sysman/source/memory/windows/CMakeLists.txt
+++ b/level_zero/sysman/source/memory/windows/CMakeLists.txt
@@ -7,6 +7,7 @@
 if(WIN32)
   target_sources(${L0_STATIC_LIB_NAME}
                  PRIVATE
+                 ${CMAKE_CURRENT_SOURCE_DIR}/CMakeLists.txt
                  ${CMAKE_CURRENT_SOURCE_DIR}/os_memory_imp.h
                  ${CMAKE_CURRENT_SOURCE_DIR}/os_memory_imp.cpp
   )
diff --git a/level_zero/sysman/test/unit_tests/sources/firmware_util/CMakeLists.txt b/level_zero/sysman/test/unit_tests/sources/firmware_util/CMakeLists.txt
index fd56136332..47618c3f48 100644
--- a/level_zero/sysman/test/unit_tests/sources/firmware_util/CMakeLists.txt
+++ b/level_zero/sysman/test/unit_tests/sources/firmware_util/CMakeLists.txt
@@ -6,6 +6,7 @@
 
 if(igsc_FOUND)
   set(L0_SRCS_SYSMAN_LINUX_FIRMWARE_UTIL_TEST
+      ${CMAKE_CURRENT_SOURCE_DIR}/CMakeLists.txt
       ${CMAKE_CURRENT_SOURCE_DIR}/test_fw_util.cpp
       ${CMAKE_CURRENT_SOURCE_DIR}/mock_fw_util_fixture.h
       ${CMAKE_CURRENT_SOURCE_DIR}/test_fw_util_helper.cpp
diff --git a/level_zero/tools/source/debug/CMakeLists.txt b/level_zero/tools/source/debug/CMakeLists.txt
index 6614d0d211..dc041970c5 100644
--- a/level_zero/tools/source/debug/CMakeLists.txt
+++ b/level_zero/tools/source/debug/CMakeLists.txt
@@ -1,11 +1,12 @@
 #
-# Copyright (C) 2021-2022 Intel Corporation
+# Copyright (C) 2021-2023 Intel Corporation
 #
 # SPDX-License-Identifier: MIT
 #
 
 target_sources(${L0_STATIC_LIB_NAME}
                PRIVATE
+               ${CMAKE_CURRENT_SOURCE_DIR}/CMakeLists.txt
                ${CMAKE_CURRENT_SOURCE_DIR}/debug_session.h
                ${CMAKE_CURRENT_SOURCE_DIR}/debug_session_imp.cpp
                ${CMAKE_CURRENT_SOURCE_DIR}/debug_session_imp.h
diff --git a/level_zero/tools/source/debug/windows/CMakeLists.txt b/level_zero/tools/source/debug/windows/CMakeLists.txt
index 971dc28d3b..3881ab0c10 100644
--- a/level_zero/tools/source/debug/windows/CMakeLists.txt
+++ b/level_zero/tools/source/debug/windows/CMakeLists.txt
@@ -1,5 +1,5 @@
 #
-# Copyright (C) 2021-2022 Intel Corporation
+# Copyright (C) 2021-2023 Intel Corporation
 #
 # SPDX-License-Identifier: MIT
 #
@@ -7,8 +7,8 @@
 if(WIN32)
   target_sources(${L0_STATIC_LIB_NAME}
                  PRIVATE
+                 ${CMAKE_CURRENT_SOURCE_DIR}/CMakeLists.txt
                  ${CMAKE_CURRENT_SOURCE_DIR}/debug_session.cpp
                  ${CMAKE_CURRENT_SOURCE_DIR}/debug_session.h
-                 ${CMAKE_CURRENT_SOURCE_DIR}/CMakeLists.txt
   )
 endif()
diff --git a/level_zero/tools/source/sysman/fan/linux/CMakeLists.txt b/level_zero/tools/source/sysman/fan/linux/CMakeLists.txt
index 3d3fe9c9e2..5486f65e54 100644
--- a/level_zero/tools/source/sysman/fan/linux/CMakeLists.txt
+++ b/level_zero/tools/source/sysman/fan/linux/CMakeLists.txt
@@ -7,6 +7,7 @@
 if(UNIX)
   target_sources(${L0_STATIC_LIB_NAME}
                  PRIVATE
+                 ${CMAKE_CURRENT_SOURCE_DIR}/CMakeLists.txt
                  ${CMAKE_CURRENT_SOURCE_DIR}/os_fan_imp.cpp
                  ${CMAKE_CURRENT_SOURCE_DIR}/os_fan_imp.h
   )
diff --git a/level_zero/tools/source/sysman/firmware_util/CMakeLists.txt b/level_zero/tools/source/sysman/firmware_util/CMakeLists.txt
index ff7d76c5a2..01775d3508 100644
--- a/level_zero/tools/source/sysman/firmware_util/CMakeLists.txt
+++ b/level_zero/tools/source/sysman/firmware_util/CMakeLists.txt
@@ -7,6 +7,7 @@
 if(igsc_FOUND)
   target_sources(${L0_STATIC_LIB_NAME}
                  PRIVATE
+                 ${CMAKE_CURRENT_SOURCE_DIR}/CMakeLists.txt
                  ${CMAKE_CURRENT_SOURCE_DIR}/firmware_util_imp.cpp
                  ${CMAKE_CURRENT_SOURCE_DIR}/firmware_util_imp.h
                  ${CMAKE_CURRENT_SOURCE_DIR}/firmware_util.h
@@ -17,6 +18,7 @@ if(igsc_FOUND)
 else()
   target_sources(${L0_STATIC_LIB_NAME}
                  PRIVATE
+                 ${CMAKE_CURRENT_SOURCE_DIR}/CMakeLists.txt
                  ${CMAKE_CURRENT_SOURCE_DIR}/firmware_util_imp_stub.cpp
                  ${CMAKE_CURRENT_SOURCE_DIR}/firmware_util.h
                  ${CMAKE_CURRENT_SOURCE_DIR}/igsc_wrapper.h
diff --git a/level_zero/tools/source/sysman/frequency/windows/CMakeLists.txt b/level_zero/tools/source/sysman/frequency/windows/CMakeLists.txt
index f1f352d6fd..156fc095a3 100644
--- a/level_zero/tools/source/sysman/frequency/windows/CMakeLists.txt
+++ b/level_zero/tools/source/sysman/frequency/windows/CMakeLists.txt
@@ -7,6 +7,7 @@
 if(WIN32)
   target_sources(${L0_STATIC_LIB_NAME}
                  PRIVATE
+                 ${CMAKE_CURRENT_SOURCE_DIR}/CMakeLists.txt
                  ${CMAKE_CURRENT_SOURCE_DIR}/os_frequency_imp.h
                  ${CMAKE_CURRENT_SOURCE_DIR}/os_frequency_imp.cpp
   )
diff --git a/level_zero/tools/source/sysman/linux/nl_api/CMakeLists.txt b/level_zero/tools/source/sysman/linux/nl_api/CMakeLists.txt
index f992bba075..9a0c733f78 100644
--- a/level_zero/tools/source/sysman/linux/nl_api/CMakeLists.txt
+++ b/level_zero/tools/source/sysman/linux/nl_api/CMakeLists.txt
@@ -8,6 +8,7 @@ if(UNIX)
   if(LIBGENL_FOUND)
     target_sources(${L0_STATIC_LIB_NAME}
                    PRIVATE
+                   ${CMAKE_CURRENT_SOURCE_DIR}/CMakeLists.txt
                    ${CMAKE_CURRENT_SOURCE_DIR}/nl_api.h
                    ${CMAKE_CURRENT_SOURCE_DIR}/nl_api.cpp
                    ${CMAKE_CURRENT_SOURCE_DIR}/iaf_nl_api.h
diff --git a/level_zero/tools/source/sysman/linux/pmt/CMakeLists.txt b/level_zero/tools/source/sysman/linux/pmt/CMakeLists.txt
index c77e1cd715..8a86f84292 100644
--- a/level_zero/tools/source/sysman/linux/pmt/CMakeLists.txt
+++ b/level_zero/tools/source/sysman/linux/pmt/CMakeLists.txt
@@ -7,6 +7,7 @@
 if(UNIX)
   target_sources(${L0_STATIC_LIB_NAME}
                  PRIVATE
+                 ${CMAKE_CURRENT_SOURCE_DIR}/CMakeLists.txt
                  ${CMAKE_CURRENT_SOURCE_DIR}/pmt_helper.cpp
                  ${CMAKE_CURRENT_SOURCE_DIR}/pmt.cpp
                  ${CMAKE_CURRENT_SOURCE_DIR}/pmt.h
diff --git a/level_zero/tools/source/sysman/linux/pmu/CMakeLists.txt b/level_zero/tools/source/sysman/linux/pmu/CMakeLists.txt
index 964b9bfc8d..fff9e2cd70 100644
--- a/level_zero/tools/source/sysman/linux/pmu/CMakeLists.txt
+++ b/level_zero/tools/source/sysman/linux/pmu/CMakeLists.txt
@@ -7,6 +7,7 @@
 if(UNIX)
   target_sources(${L0_STATIC_LIB_NAME}
                  PRIVATE
+                 ${CMAKE_CURRENT_SOURCE_DIR}/CMakeLists.txt
                  ${CMAKE_CURRENT_SOURCE_DIR}/pmu_imp.cpp
                  ${CMAKE_CURRENT_SOURCE_DIR}/pmu_imp.h
                  ${CMAKE_CURRENT_SOURCE_DIR}/pmu.h
diff --git a/level_zero/tools/source/sysman/linux/udev/CMakeLists.txt b/level_zero/tools/source/sysman/linux/udev/CMakeLists.txt
index d3c9996967..437c3d7be9 100644
--- a/level_zero/tools/source/sysman/linux/udev/CMakeLists.txt
+++ b/level_zero/tools/source/sysman/linux/udev/CMakeLists.txt
@@ -7,6 +7,7 @@
 if(LIBUDEV_FOUND)
   target_sources(${L0_STATIC_LIB_NAME}
                  PRIVATE
+                 ${CMAKE_CURRENT_SOURCE_DIR}/CMakeLists.txt
                  ${CMAKE_CURRENT_SOURCE_DIR}/udev_lib_imp.cpp
                  ${CMAKE_CURRENT_SOURCE_DIR}/udev_lib_imp.h
                  ${CMAKE_CURRENT_SOURCE_DIR}/udev_lib.h
@@ -14,6 +15,7 @@ if(LIBUDEV_FOUND)
 else()
   target_sources(${L0_STATIC_LIB_NAME}
                  PRIVATE
+                 ${CMAKE_CURRENT_SOURCE_DIR}/CMakeLists.txt
                  ${CMAKE_CURRENT_SOURCE_DIR}/udev_lib_imp_stub.cpp
                  ${CMAKE_CURRENT_SOURCE_DIR}/udev_lib.h
   )
diff --git a/level_zero/tools/source/sysman/memory/windows/CMakeLists.txt b/level_zero/tools/source/sysman/memory/windows/CMakeLists.txt
index c888a539c3..887e9d65e6 100755
--- a/level_zero/tools/source/sysman/memory/windows/CMakeLists.txt
+++ b/level_zero/tools/source/sysman/memory/windows/CMakeLists.txt
@@ -7,6 +7,7 @@
 if(WIN32)
   target_sources(${L0_STATIC_LIB_NAME}
                  PRIVATE
+                 ${CMAKE_CURRENT_SOURCE_DIR}/CMakeLists.txt
                  ${CMAKE_CURRENT_SOURCE_DIR}/os_memory_imp.h
                  ${CMAKE_CURRENT_SOURCE_DIR}/os_memory_imp.cpp
   )
diff --git a/level_zero/tools/source/sysman/ras/windows/CMakeLists.txt b/level_zero/tools/source/sysman/ras/windows/CMakeLists.txt
index e33a1c610e..70cf228992 100755
--- a/level_zero/tools/source/sysman/ras/windows/CMakeLists.txt
+++ b/level_zero/tools/source/sysman/ras/windows/CMakeLists.txt
@@ -7,6 +7,7 @@
 if(WIN32)
   target_sources(${L0_STATIC_LIB_NAME}
                  PRIVATE
+                 ${CMAKE_CURRENT_SOURCE_DIR}/CMakeLists.txt
                  ${CMAKE_CURRENT_SOURCE_DIR}/os_ras_imp.cpp
   )
 endif()
diff --git a/level_zero/tools/test/unit_tests/sources/sysman/firmware_util/CMakeLists.txt b/level_zero/tools/test/unit_tests/sources/sysman/firmware_util/CMakeLists.txt
index 9213fa008b..2cb072d5c4 100644
--- a/level_zero/tools/test/unit_tests/sources/sysman/firmware_util/CMakeLists.txt
+++ b/level_zero/tools/test/unit_tests/sources/sysman/firmware_util/CMakeLists.txt
@@ -6,6 +6,7 @@
 
 if(igsc_FOUND)
   target_sources(${TARGET_NAME} PRIVATE
+                 ${CMAKE_CURRENT_SOURCE_DIR}/CMakeLists.txt
                  ${CMAKE_CURRENT_SOURCE_DIR}/test_fw_util.cpp
                  ${CMAKE_CURRENT_SOURCE_DIR}/mock_fw_util_fixture.h
                  ${CMAKE_CURRENT_SOURCE_DIR}/test_fw_util_helper.cpp